This device measures the thickness of wafers and display panels after partial processes such as wafer slicing, grinding, thinning, and slicing. Can synchronously test the TTVBOWWRAP/SORI and other parameter errors of the material itself.
Project |
Performance index |
Use ceramic disc size |
φ260/268/305/360mm, Automated loading and unloading of robotic arms |
Equipment measurement resolution |
0.005um |
Measurement repeatability |
≤0.5um |
Measurement accuracy |
≤ 1um (measurement comparison accuracy is affected by ceramic disc and wax layer) |
Measuring range |
0-1000um |
Number of measurement points |
1. 3, 5, 9... N (number of points can be set) |
Measurement efficiency |
Fastest 18sec/p, 5-point sampling |
Measure bandwidth |
Max 10000Point/sec |
Measure material |
Transparent, non transparent, smooth, rough samples such as GaN, GaAs, Si, SiN, Sic, etc |