The wafer scratch AOI inspection machine is mainly used for detecting obvious scratch defects such as missed scratches, defocusing, uncut, and bicrystals on the core grains on the Disco ring after wafer splitting machine processing. Through Machine Vision defect detection, the presence or absence of the above defects can be detected to distinguish between good and defective products, reduce manual labor, and improve detection efficiency.
Project |
Performance index |
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Detection system |
Detection range (Product size) |
4-inch material box size: 222mm × 215mm × 145mm (L × W × H) Disco ring size: 212 (L) × 212 (W) mm, Ø 194 (inner ring), Ø 228 (outer ring), 1.2 (thickness) mm Weight: Empty ring 66.5g, actual weight 86.5g (piece weight 20g) |
6-inch material box size: 288mm × 279mm × 182mm (L × W × H) Disco ring size: 212 (L) × 212 (W) mm, Ø 194 (inner ring), Ø 228 (outer ring), 1.2 (thickness) mm Weight: Empty ring 154.5g, actual weight 224.5g (piece weight 70g) |
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Testing items |
Omission, defocusing, uncut, twin crystal |
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Detection accuracy |
3.5um |
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Loss inspection rate |
0.01% |
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Over inspection rate |
≤0.5% |
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Capacity |
≥4800pcs |
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Machine utilization rate |
≥90% |
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Change line time |
New model switching time<60 minutes |
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Existing model switching time<30 minutes |
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Others |
Safety protection |
Safety grating/safety door lock: used for personnel safety protection |
FFU: Used for clean equipment to achieve Class 1000 and Class 100 cleanrooms in internal spaces |
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Static electricity: The material in contact with the product is made of anti-static material and equipped with an ion air rod to eliminate static electricity |
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Power supply |
AC 220V±10% 50~60Hz |
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Ionic specifications |
The ion dissipation rate in the homework area is less than 5 seconds; Ionic equilibrium voltage within 100V |
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Usage environment |
Temperature: 5-40 ℃ |
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Internal temperature of machine |
Humidity: 25~85% RH (without condensation) |
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<40℃ |
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Positive pressure gas source |
0.5~0.6MPa, access port provided by the manufacturer |
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Negative pressure gas source |
-80kpa, access port provided by the manufacturer |
Defect image